发布日期:2026/3/10 19:21:36
日本ULVAC爱发科多级根式干式真空泵在一个称为套管的箱体内有两个三叶片转子,由同一循环中的一对齿轮以相反方向旋转。
转子与转子和套壳不接触,旋转以转移和压缩气体,同时保持轻微间隙。
转子被制成多级结构,将其压缩至大气压并将转子排入大气中。
转子外壳中不使用油或其他密封液,确保排气干净。
油用于齿轮和轴承的润滑,但密封结构设计防止油进入套管。
HR60,HR90,HR300,HR600,HR1200,GR60,GR90,GR180,CR16B,CR30B,CR60B-S,CR60B-T,CR300B,RS-01,RS-02,RS-03,
ES10,ES4A,ECO-SHOCK,LR60,LR90,LR180,LR421,LR421-T,LR300,LR600,LR1200,LR1800,LR3601,LR3601-T(TT),LR3601-R,LR3601-TR(TTR),RDA-281H,
RDA-281HA,RDA-501H,RDA-501HA,
MS120A,MS600A,MS1200A,LS120A,LS300A,LS600A,LS1200A,MBD-S,CRYO-U8H,CRYO-U4H,CRYO-U6H,CRYO-U8H,CRYO-U8H-U,
CRYO-U8HL,CRYO-U8HSP,CRYO-U10H
CRYO-U10HSP,CRYO-U12H,CRYO-U12HL,CRYO-U12HSP,CRYO-U16,CRYO-U16P,CRYO-U20P,CRYO-U20H,CRYO-U22P,CRYO-U22WB,
CRYO-U22H,
CRYO-U30H,C10T,C10AT,C15R,C30VR,C30VRT,C30MVR,C30MVRT,C30PVRT,C30PMVRT,C40R,PR1A,PR2A,PR3A,RBH-6,RBH-8,
RBH-8HSP,RBH-10,
RBH-12,RBH-16,RBH-20,RBH-22P,RBH-22,RBH-30,MBD-S,MBD-T,CRYO-T4,CRYO-T6,CRYO-T8,CRYO-T10,CRYO-T12,CRYO-TS10,
CRYO-TS14,CRYO-TS22,
UTM300A-MS,UTM400A-MS,UTM800A-MS,UTM1000A-MS,YTP-50MB,YTP-50SAB,YTP-50MB-DRY,YTP-50SAB-DRY,YTP-300MB,
YTP-300SAB,YTP-300MB-DRY,YTP-300SAB-DRY,
YTP70A-D,UTM70B,UTM300B,UTM1200A,UTM1600A,UTM2300A,UTM3400A,VPT-060,PST-030CU,PST-030AU,PST-050CU,
PST-050A,PST-100CX,PST-100AX,
GST-07L-B,DPF-200,DPF-050,ULK-04A,ULK-06A,ULK-10A,ULK-14A,PBL-02,PBL-04,PBL-06 ,PBL-10,PBL-14,PBL-20,PFL-22,
PFL-22TM,PFL-36,PFL-52,
BW-02,BW-04B,BW-06B,BW-10,BW-14 BW-20,BW-22,BW-36,BW-52,BW-02,BW-04B,BW-06B,BW-10,BW-14,BW-20,BW-22,BW-36,
BW-52,
VPC-051,VPC-051A,VPC-250F,VFR-200M/X,VWR-400M/X,VTR-350M/X,VTS-350M/X,901W1,901D2 904W2,904D3R,904D4R,901W1,
901D2,904W2,904D3R,904D4R,
901W1,901D2,904W2,904D3R,904D4R,HELIOT MONO,CLM-07AY,CLM-08A,CLM-09AZ,CLM-10A,CLM-08E,CLM-08F,CLC-04A,CLC-05A,
CLC-06A,AS9,BS9,BT9
UNECSーPortable,UNECS-1500M,CRTM-6000G,VLPーSA020JH,VLPーSA025JH,VLPーSA040JH,VLPーSA050JH,VLPーSA065JH,VLPーSA080JH,
VLPーSA100JH,
VLPーSA150JH,VLPーSA200JH,VLPーSA250JH,VLPーSA350JH,VLPーSA016KF,VLPーSA025KF,VLPーSA040KF,VLPーSA050KF,VLPーSA063KC,
VLPーSA080KC,VLPーSA100KC,
VLPーSA160KC,VLPーSA200KC,VLPーSA250KC,VLPーSB020JH,VLPーSB025JH,VLPーSB040JH,VLPーSB050JH,VLPーSB065JH,VLPーSB080JH,
VLPーSB100JH,VLPーSB150JH